The Study of Ar I and Ne I Spectral Line Shapes in the Cathode Sheath Region of an Abnormal Glow Discharge
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The cathode sheath (CS) region is the most important part of abnormal glow discharge
(GD), where various processes relevant for the operation and application occur. The most important
parameter of the CS is the distribution of electric field strength E which is of crucial importance for
charged particles acceleration, their trajectories, kinetic energies, and collisions with other particles
and cathode sputtering. All these processes are relevant for the operation of GD as well as for
numerous applications in the field of spectroscopic analysis, plasma etching, thin film deposition,
and depth profiling of cathode material. Thus, the importance of non-perturbing technique for E
distribution measurement in the CS region was recognized long time ago. Within this article, a simple
technique based on standard optical emission spectroscopy (OES) and typical laboratory equipment
has been used for E mapping in the CS region of an abnormal glow discharge.
Keywords:
plasma applications / Spectroscopy / gas dischargesSource:
Atoms, 2019, 7Publisher:
- MDPI
Funding / projects:
- Spectroscopic diagnostics of low-temperature plasma and gas discharge: spectral line shapes and interaction with surfaces (RS-MESTD-Basic Research (BR or ON)-171014)
- Superconductivity, Magnetism, and Fluctuation Phenomena (RS-MESTD-Basic Research (BR or ON)-171027)
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Poljoprivredni fakultetTY - JOUR AU - Ivanović, Nikola V. PY - 2019 UR - http://aspace.agrif.bg.ac.rs/handle/123456789/6923 AB - The cathode sheath (CS) region is the most important part of abnormal glow discharge (GD), where various processes relevant for the operation and application occur. The most important parameter of the CS is the distribution of electric field strength E which is of crucial importance for charged particles acceleration, their trajectories, kinetic energies, and collisions with other particles and cathode sputtering. All these processes are relevant for the operation of GD as well as for numerous applications in the field of spectroscopic analysis, plasma etching, thin film deposition, and depth profiling of cathode material. Thus, the importance of non-perturbing technique for E distribution measurement in the CS region was recognized long time ago. Within this article, a simple technique based on standard optical emission spectroscopy (OES) and typical laboratory equipment has been used for E mapping in the CS region of an abnormal glow discharge. PB - MDPI T2 - Atoms T1 - The Study of Ar I and Ne I Spectral Line Shapes in the Cathode Sheath Region of an Abnormal Glow Discharge IS - 7 DO - 10.3390/atoms7010009 ER -
@article{ author = "Ivanović, Nikola V.", year = "2019", abstract = "The cathode sheath (CS) region is the most important part of abnormal glow discharge (GD), where various processes relevant for the operation and application occur. The most important parameter of the CS is the distribution of electric field strength E which is of crucial importance for charged particles acceleration, their trajectories, kinetic energies, and collisions with other particles and cathode sputtering. All these processes are relevant for the operation of GD as well as for numerous applications in the field of spectroscopic analysis, plasma etching, thin film deposition, and depth profiling of cathode material. Thus, the importance of non-perturbing technique for E distribution measurement in the CS region was recognized long time ago. Within this article, a simple technique based on standard optical emission spectroscopy (OES) and typical laboratory equipment has been used for E mapping in the CS region of an abnormal glow discharge.", publisher = "MDPI", journal = "Atoms", title = "The Study of Ar I and Ne I Spectral Line Shapes in the Cathode Sheath Region of an Abnormal Glow Discharge", number = "7", doi = "10.3390/atoms7010009" }
Ivanović, N. V.. (2019). The Study of Ar I and Ne I Spectral Line Shapes in the Cathode Sheath Region of an Abnormal Glow Discharge. in Atoms MDPI.(7). https://doi.org/10.3390/atoms7010009
Ivanović NV. The Study of Ar I and Ne I Spectral Line Shapes in the Cathode Sheath Region of an Abnormal Glow Discharge. in Atoms. 2019;(7). doi:10.3390/atoms7010009 .
Ivanović, Nikola V., "The Study of Ar I and Ne I Spectral Line Shapes in the Cathode Sheath Region of an Abnormal Glow Discharge" in Atoms, no. 7 (2019), https://doi.org/10.3390/atoms7010009 . .